Integrated Optical Displacement Detection and Electrostatic Actuation for Directional Optical Microphones With Micromachined Biomimetic Diaphragms

In this paper, integration and packaging of directional biomimetic microphones using a diffraction-based optical displacement detection method is described. The optical detection method senses the displacement of the microphone diaphragm by monitoring the change in the intensity of a diffracted lase...

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Bibliographic Details
Published in:IEEE sensors journal 2009-12, Vol.9 (12), p.1933-1941
Main Authors: Bicen, B., Jolly, S., Jeelani, K., Garcia, C.T., Hall, N.A., Degertekin, F.L., Quang Su, Weili Cui, Miles, R.N.
Format: Article
Language:English
Subjects:
Acoustic transducers
Active control
Biomedical optical imaging
Biomimetics
Diaphragms
Diffraction
Displacement
Electrostatic actuators
Electrostatics
force feedback
Integrated optics
Mathematical models
MEMS
Microphones
Optical detectors
Optical feedback
optical interferometry
optical modeling
Optical noise
Optical sensors
optical transducers
Packages
Packaging
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Summary:In this paper, integration and packaging of directional biomimetic microphones using a diffraction-based optical displacement detection method is described. The optical detection method senses the displacement of the microphone diaphragm by monitoring the change in the intensity of a diffracted laser beam. A detailed optical model of the integrated optical detection scheme is developed and used to guide the package design. Measurement results with microphone packages suitable for hearing aid and acoustic measurement systems show that the noise and sensitivity performances of these small-sized microphones are comparable with commercial miniature directional microphones. These microphones incorporate integrated electrostatic actuators which can be used for active feedback control. This capability is also demonstrated to improve the frequency response of the microphone without degrading its noise performance.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2009.2031810