Thin-film nano- and micro-electromechanical systems – the basis of contemporary and future pressure sensors for rocket and aviation engineering

Ways of improving information converters are considered, in particular, primary information converters (sensors). Problems are described that arise during the use of sensors in space rocket and aviation engineering. Designs are presented for thin-film nano- and micro-electromechanical systems that a...

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Bibliographic Details
Published in:Measurement techniques 2009-07, Vol.52 (7), p.739-744
Main Authors: Belozubov, E. M., Vasil’ev, V. A., Gromkov, N. V.
Format: Article
Language:English
Subjects:
Aerospace engineering
Analytical Chemistry
Aviation
Bridges
Characterization and Evaluation of Materials
Deformation
Engineering
Measurement Science and Instrumentation
Measurement techniques
Mechanical Measurements
Membranes
Microelectronics
Physical Chemistry
Physics
Physics and Astronomy
Pneumatics
Sensors
Studies
Temperature
Thin films
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Summary:Ways of improving information converters are considered, in particular, primary information converters (sensors). Problems are described that arise during the use of sensors in space rocket and aviation engineering. Designs are presented for thin-film nano- and micro-electromechanical systems that are the basis of contemporary and future tensoresistive pressure sensors. Areas of research are determined with the aim of minimizing the effect of critical destabilizing factors (temperature, vibration) within these systems and pressure sensors based upon them.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-009-9336-x