Measurement of ozone over a wide range of concentrations using semiconductor NiO gas sensors

The ozone-sensitive properties of two types of semiconductor NiO gas sensors having different widths of the active layer are investigated. Their calibration characteristics for ozone concentrations of 0–300 ppb and different temperature ranges are obtained. Sensors with a thin NiO layer showed good...

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Bibliographic Details
Published in:Measurement techniques 2008-09, Vol.51 (9), p.1038-1044
Main Authors: Demin, V. S., Krasovskii, A. N., Lyudchik, A. M., Pokatashkin, V. I., Grigorishin, I. L., Kudanovich, O. N.
Format: Article
Language:English
Subjects:
Analytical Chemistry
Calibration
Characterization and Evaluation of Materials
Gas flow
Gases
Investigations
Measurement Science and Instrumentation
Measurement techniques
Outdoor air quality
Ozone
Physical Chemistry
Physicochemical Measurements
Physics
Physics and Astronomy
Semiconductors
Sensors
Studies
Temperature
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Summary:The ozone-sensitive properties of two types of semiconductor NiO gas sensors having different widths of the active layer are investigated. Their calibration characteristics for ozone concentrations of 0–300 ppb and different temperature ranges are obtained. Sensors with a thin NiO layer showed good operating capability for ozone concentrations of up to tens of ppm. The results of parallel operation of the sensors as the active elements of a model of an ozone meter and a series analyzer of ozone confirmed the possibility of using them in ozone-measuring apparatus.
ISSN:0543-1972
1573-8906
DOI:10.1007/s11018-008-9149-3