Low loss etchless silicon photonic waveguides

We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables...

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Bibliographic Details
Published in:Optics express 2009-03, Vol.17 (6), p.4752-4757
Main Authors: Cardenas, Jaime, Poitras, Carl B, Robinson, Jacob T, Preston, Kyle, Chen, Long, Lipson, Michal
Format: Article
Language:English
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Summary:We demonstrate low loss silicon waveguides fabricated without any silicon etching. We define the waveguides by selective oxidation which produces ultra-smooth sidewalls with width variations of 0.3 nm. The waveguides have a propagation loss of 0.3 dB/cm at 1.55 microm. The waveguide geometry enables low bending loss of approximately 0.007 dB/bend for a 90 degrees bend with a 50 microm bending radius.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.17.004752