Subsurface microscopy of integrated circuits with angular spectrum and polarization control

We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (lambda(0)/9) i...

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Bibliographic Details
Published in:Optics letters 2009-04, Vol.34 (8), p.1261-1263
Main Authors: KÖKLÜ, F. H, IPPOLITO, S. B, GOLDBERG, B. B, UNLÜ, M. S
Format: Article
Language:English
Subjects:
Applied classical electromagnetism
Conventional optical microscopes
Electromagnetic wave propagation, radiowave propagation
Electromagnetism
electron and ion optics
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Optics
Physics
Polarization
Wave optics
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Summary:We investigate the effect of an annular pupil-plane aperture in confocal imaging while using an NA increasing lens. We show that focal spot shape is highly sensitive to both polarization and angular spectrum of the incoming light. We demonstrate a lateral spatial resolution of 145 nm (lambda(0)/9) in the direction perpendicular to the polarization direction.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.34.001261