Modeling of the formation and transport of nanoparticles in silane plasmas

• Published in: Physical review. E, Statistical, nonlinear, and soft matter physics Statistical, nonlinear, and soft matter physics, 2004-11, Vol.70 (5 Pt 2), p.056407-056407, Article 056407
• Main Authors: De Bleecker, Kathleen, Bogaerts, Annemie, Goedheer, Wim
• Format: Article
• Language: English
• ISSN: 1539-3755; 1550-2376
• DOI: 10.1103/physreve.70.056407

The behavior of nanoparticles in a low-pressure silane discharge is studied with the use of a self-consistent one-dimensional fluid model. Nanoparticles of a given (prescribed) radius are formed in the discharge by the incorporation of a dust growth mechanism, i.e., by including a step in which large anions (typically Si12 H-25 ), produced in successive chemical reactions of anions with silane molecules, are transformed into particles. Typically a few thousand anions are used for one nanoparticle. The resulting particle density and the charge on the particles are calculated with an iterative method. While the spatial distribution and the charge of the particles are influenced by the plasma, the presence of the nanoparticles will in turn influence the plasma properties. Several simulations with different particle radii are performed. The resulting density profile of the dust will greatly depend on the particle size, as it reacts to the shift of the balance of the different forces acting on the particles.