Extremely high aspect ratio alumina transmission nanomasks: their fabrication and characterization using electron microscopy

Free standing, nanoporous alumina templates were fabricated as transmission masks from aluminium using a two-step anodization process followed by acid etching. The resulting membrane comprises self-ordered, periodic arrays of non-connecting circular channels which can be prepared with pore diameters

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Bibliographic Details
Published in:Nanotechnology 2009-02, Vol.20 (6), p.065706-065706 (6)
Main Authors: Fang, Jing-Hua, Spizzirri, Paul, Cimmino, Alberto, Rubanov, Sergey, Prawer, Steven
Format: Article
Language:English
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Description
Summary:Free standing, nanoporous alumina templates were fabricated as transmission masks from aluminium using a two-step anodization process followed by acid etching. The resulting membrane comprises self-ordered, periodic arrays of non-connecting circular channels which can be prepared with pore diameters
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/20/6/065706