High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range

High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at th...

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Bibliographic Details
Published in:Optics express 2009-08, Vol.17 (17), p.14543-14551
Main Authors: Hosseini, Ehsan Shah, Yegnanarayanan, Siva, Atabaki, Amir Hossein, Soltani, Mohammad, Adibi, Ali
Format: Article
Language:English
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Summary:High quality factor (Q approximately 3.4 x 10(6)) microdisk resonators are demonstrated in a Si(3)N(4) on SiO(2) platform at 652-660 nm with integrated in-plane coupling waveguides. Critical coupling to several radial modes is demonstrated using a rib-like structure with a thin Si(3)N(4) layer at the air-substrate interface to improve the coupling.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.17.014543