Optical broadband monitoring of conventional and ion processes

This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. Besides a monochromator system with a moving grating for the deep ultraviolet/vacuum ultraviolet (DUV/VUV) spectral range, two approaches are presented for online spectrophotometers...

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Bibliographic Details
Published in:Applied optics (2004) 2006-03, Vol.45 (7), p.1495-1501
Main Authors: Ristau, Detlev, Ehlers, Henrik, Gross, Tobias, Lappschies, Marc
Format: Article
Language:English
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Summary:This contribution is focused on applications of spectroscopic methods for the precise control of deposition processes. Besides a monochromator system with a moving grating for the deep ultraviolet/vacuum ultraviolet (DUV/VUV) spectral range, two approaches are presented for online spectrophotometers with CCD arrays. The conventional spectrophotometer is considered for the operator-assisted deposition of fluoride coatings applied in the DUV/VUV range. The concepts with CCD arrays are combined with an advanced software tool for an automatic production of optical coatings. An ion-assisted deposition process and ion-beam sputtering are considered for rapid manufacturing of complex layer systems in the visible and near-infrared spectral ranges. The present contribution summarizes and discusses the major aspects of the described combinations.
ISSN:1559-128X
DOI:10.1364/AO.45.001495