Zeptogram-Scale Nanomechanical Mass Sensing

Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor ∼20 zg. Our best mass resolution corresponds to ∼7 zg, equivalent to ∼30 xenon atoms or the mass of an in...

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Bibliographic Details
Published in:Nano letters 2006-04, Vol.6 (4), p.583-586
Main Authors: Yang, Y. T, Callegari, C, Feng, X. L, Ekinci, K. L, Roukes, M. L
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Equipment Design
Equipment Failure Analysis
Exact sciences and technology
Flow Injection Analysis - instrumentation
Flow Injection Analysis - methods
Gases - analysis
Mechanics
Micro- and nanoelectromechanical devices (mems/nems)
Microchemistry - instrumentation
Microchemistry - methods
Microfluidic Analytical Techniques - instrumentation
Microfluidic Analytical Techniques - methods
Molecular Weight
Nanotechnology - instrumentation
Nanotechnology - methods
Particle Size
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transducers
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Summary:Very high frequency (VHF) nanoelectromechanical systems (NEMS) provide unprecedented sensitivity for inertial mass sensing. We demonstrate in situ measurements in real time with mass noise floor ∼20 zg. Our best mass resolution corresponds to ∼7 zg, equivalent to ∼30 xenon atoms or the mass of an individual 4 kDa molecule. Detailed analysis of the ultimate sensitivity of such devices based on these experimental results indicates that NEMS can ultimately provide inertial mass sensing of individual intact, electrically neutral macromolecules with single-Dalton (1 amu) resolution.
ISSN:1530-6984
1530-6992
DOI:10.1021/nl052134m