Effect of Energy Dependence of Primary Beam Divergence on the X-ray Standing Wave Characterization of Layered Materials

Incident primary beam divergence is a source of systematic error in X-ray standing wave (XSW) characterization of single and multilayer thin films. Primary beam divergence significantly alters the XSW profile of a layered material and can lead to large errors when used with higher excitation energie...

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Bibliographic Details
Published in:Analytical Sciences 2005, Vol.21(7), pp.757-762
Main Authors: TIWARI, M. K., NAIK, S. R., LODHA, G. S., NANDEDKAR, R. V.
Format: Article
Language:English
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Summary:Incident primary beam divergence is a source of systematic error in X-ray standing wave (XSW) characterization of single and multilayer thin films. Primary beam divergence significantly alters the XSW profile of a layered material and can lead to large errors when used with higher excitation energies. The present study suggests that when one uses Mo-Kα excitation, the primary beam divergence should be in range of 0.0050. On the other hand, in the case of Cu-Kα excitation, primary beam divergence can be relaxed up to 0.010.
ISSN:0910-6340
1348-2246
DOI:10.2116/analsci.21.757