Characterizing probe performance in the aberration corrected STEM

Sub-Ångstrom imaging using the 120 kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multislice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell...

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Bibliographic Details
Published in:Ultramicroscopy 2006-10, Vol.106 (11), p.1104-1114
Main Author: Batson, P.E.
Format: Article
Language:English
Subjects:
Aberration correction
Quadrupole–octupole corrector
Scanning transmission electron microscopy
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Summary:Sub-Ångstrom imaging using the 120 kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multislice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell structures in the [1 1 0] and [2 1 1] projections illustrate this finding. Using fast image acquisition, atomic movement appears ubiquitous under the electron beam, and may be useful to illuminate atomic level processes.
ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2006.04.025