A microfabricated sensor for thin dielectric layers

We describe a sensor for the measurement of thin dielectric layers capable of operation in a variety of environments. The sensor is obtained by microfabricating a capacitor with interleaved aluminum fingers, exposed to the dielectric to be measured. In particular, the device can measure thin layers...

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Bibliographic Details
Published in:Review of scientific instruments 2008-04, Vol.79 (4), p.045101-045101-7
Main Authors: Fierlinger, P., DeVoe, R., Flatt, B., Gratta, G., Green, M., Kolkowitz, S., Leport, F., Montero Diez, M., Neilson, R., O'Sullivan, K., Pocar, A., Wodin, J.
Format: Article
Language:English
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Summary:We describe a sensor for the measurement of thin dielectric layers capable of operation in a variety of environments. The sensor is obtained by microfabricating a capacitor with interleaved aluminum fingers, exposed to the dielectric to be measured. In particular, the device can measure thin layers of solid frozen from a liquid or gaseous medium. Sensitivity to single atomic layers is achievable in many configurations and, by utilizing fast, high sensitivity capacitance readout in a feedback system onto environmental parameters; coatings of few layers can be dynamically maintained. We discuss the design, readout, and calibration of several versions of the device optimized in different ways. We specifically dwell on the case in which atomically thin solid xenon layers are grown and stabilized, in cryogenic conditions, from a liquid xenon bath.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2906402