Quantitative measurement of piezoelectric coefficient of thin film using a scanning evanescent microwave microscope

This article describes a new approach to quantitatively measure the piezoelectric coefficients of thin films at the microscopic level using a scanning evanescent microwave microscope. This technique can resolve 10 pm deformation caused by the piezoelectric effect and has the advantages of high scann...

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Bibliographic Details
Published in:Review of scientific instruments 2008-06, Vol.79 (6), p.064704-064704
Main Authors: Zhao, Zhenli, Luo, Zhenlin, Liu, Chihui, Wu, Wenbin, Gao, Chen, Lu, Yalin
Format: Article
Language:English
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Summary:This article describes a new approach to quantitatively measure the piezoelectric coefficients of thin films at the microscopic level using a scanning evanescent microwave microscope. This technique can resolve 10 pm deformation caused by the piezoelectric effect and has the advantages of high scanning speed, large scanning area, submicron spatial resolution, and a simultaneous accessibility to many other related properties. Results from the test measurements on the longitudinal piezoelectric coefficient of PZT thin film agree well with those from other techniques listed in literatures.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2940275