Fabrication of one-dimensional programmable-height nanostructures via dynamic stencil deposition

Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the ability to directly deposit nanostructures with programmable-height profiles. However, DSD systems have not enjoyed widespread usage due to their c...

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Bibliographic Details
Published in:Review of scientific instruments 2008-07, Vol.79 (7), p.073909-073909
Main Authors: Wasserman, J L, Lucas, K, Lee, S H, Ashton, A, Crowl, C T, Marković, N
Format: Article
Language:English
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Summary:Dynamic stencil deposition (DSD) techniques offer a variety of fabrication advantages not possible with traditional lithographic processing, such as the ability to directly deposit nanostructures with programmable-height profiles. However, DSD systems have not enjoyed widespread usage due to their complexity. We demonstrate a simple, low-profile, portable, one-dimensional nanotranslation system that facilitates access to nanoscale DSD abilities. Furthermore we show a variety of fabricated programmable-height nanostructures, including parallel arrays of such structures, and suggest other applications that exploit the unique capabilities of DSD fabrication methods.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2960573