Sub-10 nm Device Fabrication in a Transmission Electron Microscope

We show that a high-resolution transmission electron microscope can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. Fabricated devices include nanogaps, nanodiscs, nanorings, nanochannels, and nanowires with tailored curvatures and multi-te...

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Bibliographic Details
Published in:Nano letters 2007-05, Vol.7 (5), p.1329-1337
Main Authors: Fischbein, Michael D, Drndić, Marija
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Electronics
Exact sciences and technology
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Materials science
Molecular electronics, nanoelectronics
Nanocrystalline materials
Nanoscale materials and structures: fabrication and characterization
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:We show that a high-resolution transmission electron microscope can be used to fabricate metal nanostructures and devices on insulating membranes by nanosculpting metal films. Fabricated devices include nanogaps, nanodiscs, nanorings, nanochannels, and nanowires with tailored curvatures and multi-terminal nanogap devices with nanoislands or nanoholes between the terminals. The high resolution, geometrical flexibility, and yield make this fabrication method attractive for many applications including nanoelectronics and nanofluidics.
ISSN:1530-6984
1530-6992
DOI:10.1021/nl0703626