Synthesis and Characterization of Diorganohydrazido(2–) Tungsten Complexes

Diorganohydrazido(2–) complexes of tungsten (L)Cl4W(NNR2) [R2 = Me2, Ph2, –(CH2)5–; L = CH3CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2)...

Full description

Saved in:
Bibliographic Details
Published in:Inorganic chemistry 2008-06, Vol.47 (11), p.4457-4462
Main Authors: Koller, Jürgen, Ajmera, Hiral M, Abboud, Khalil A, Anderson, Timothy J, McElwee-White, Lisa
Format: Article
Language:English
Subjects:
Acetonitrile
Crystal structure
Deposition
Mass spectrometry
Precursors
Pyridines
Synthesis
Tungsten
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Diorganohydrazido(2–) complexes of tungsten (L)Cl4W(NNR2) [R2 = Me2, Ph2, –(CH2)5–; L = CH3CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2) and (CH3CN)Cl4W(NNPh2) allows a comparison of the structural features of the diorganohydrazido(2–) functionality with varying substituents. Mass spectrometry, thermogravimetric analysis, and preliminary chemical vapor deposition experiments were performed to determine the viability of these complexes as single-source precursors for deposition of WN x and WN x C y films.
ISSN:0020-1669
1520-510X
DOI:10.1021/ic701151m