Determination of stoichiometry and concentration of trace elements in thin BaxSr1-xTiO3 perovskite layers

This paper describes an analytical procedure for determining the stoichiometry of BaxSr1-xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The perfo...

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Bibliographic Details
Published in:Analytical and bioanalytical chemistry 2001-07, Vol.370 (5), p.527-533
Main Authors: BECKER, J. S, BOULYGA, S. F
Format: Article
Language:English
Subjects:
Analytical chemistry
Chemistry
Emission spectroscopy
Exact sciences and technology
Inductively coupled plasma mass spectrometry
Mass spectrometry
Mass spectroscopy
Mathematical analysis
Perovskites
Spectrometric and optical methods
Stoichiometry
Surface analysis (chemical)
Thin films
Trace elements
X ray fluorescence analysis
X-ray fluorescence
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Summary:This paper describes an analytical procedure for determining the stoichiometry of BaxSr1-xTiO3 perovskite layers using inductively coupled plasma mass spectrometry (ICP-MS). The analytical results of mass spectrometry measurements are compared to those of X-ray fluorescence analysis (XRF). The performance and the limits of solid-state mass spectrometry analytical methods for the surface analysis of thin BaxSr1-xTiO3 perovskite layers sputtered neutral mass spectrometry (SNMS)--are investigated and discussed.
ISSN:0937-0633
1618-2642
1432-1130
1618-2650
DOI:10.1007/s002160100755