Sapphire-GaN-based planar integrated free-space optical system

We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive micro...

Full description

Saved in:
Bibliographic Details
Published in:Applied optics (2004) 2008-06, Vol.47 (16), p.2950-2955
Main Authors: Hofmann, M, Hauguth-Frank, S, Lebedev, V, Ambacher, O, Sinzinger, S
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive microoptical elements like lenses and gratings as demonstrated here and optoelectronic devices like light emitters and photodetectors on a single wafer. We present an approach for the simultaneous optimization of the efficiency of transmissive and reflective diffractive optical elements processed in a single lithographic etching step.
ISSN:1559-128X
DOI:10.1364/AO.47.002950