Sapphire-GaN-based planar integrated free-space optical system

We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive micro...

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Published in:Applied optics (2004) 2008-06, Vol.47 (16), p.2950-2955
Main Authors: Hofmann, M, Hauguth-Frank, S, Lebedev, V, Ambacher, O, Sinzinger, S
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Language:English
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container_issue 16
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container_title Applied optics (2004)
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creator Hofmann, M
Hauguth-Frank, S
Lebedev, V
Ambacher, O
Sinzinger, S
description We report on the design and fabrication of a planar integrated free-space optical system working on the basis of binary phase diffractive optical elements (DOEs) realized in GaN on a sapphire substrate. Group III-nitride/sapphire substrates enable the parallel monolithic integration of passive microoptical elements like lenses and gratings as demonstrated here and optoelectronic devices like light emitters and photodetectors on a single wafer. We present an approach for the simultaneous optimization of the efficiency of transmissive and reflective diffractive optical elements processed in a single lithographic etching step.
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title Sapphire-GaN-based planar integrated free-space optical system
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