High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

Blazed diffractive optical elements (DOEs) were studied for the violet wavelength by electron-beam lithography. By optimizing electron-beam writing parameters and electron-dose distributions, we fabricated eight kinds of grating (period A = 10-0.54 microgm) with excellent blazed structure. It has be...

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Bibliographic Details
Published in:Applied optics (2004) 2002-05, Vol.41 (13), p.2390-2393
Main Authors: Shiono, Teruhiro, Hamamoto, Tetsuya, Takahara, Koji
Format: Article
Language:English
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Summary:Blazed diffractive optical elements (DOEs) were studied for the violet wavelength by electron-beam lithography. By optimizing electron-beam writing parameters and electron-dose distributions, we fabricated eight kinds of grating (period A = 10-0.54 microgm) with excellent blazed structure. It has been demonstrated that the measured diffraction efficiency values agreed well with the rigorous theoretical ones. For the fine period of 0.54 microm, we confirmed a peak appearance of 75.6% (TE) experimentally. A wave aberration as small as approximately 0.01 lambda (rms) was obtained for the first-order diffracted wave from the fabricated DOEs. Blazed DOEs for the violet wavelength could be used as key devices in a high-density optical disk pickup of the next generation.
ISSN:1559-128X
DOI:10.1364/AO.41.002390