Combined microscope for scanning X-ray transmission and surface topography

A brief description is given of a scanning transmission X-ray microscope (STXM) for use with synchrotron radiation allowing simultaneous X-ray imaging and imaging of surface topography. Surface topography, appropriate to both conducting and non-conducting samples, is sensed by successive “specimen h...

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Bibliographic Details
Published in:Ultramicroscopy 2002-08, Vol.92 (3), p.221-232
Main Authors: Browne, M.T, Charalambous, P, Burge, R.E, Yuan, X.-C
Format: Article
Language:English
Subjects:
Conventional optical microscopes
Exact sciences and technology
Image formation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Optical instruments, equipment and techniques
Physics
Surface topography
X- and γ-ray instruments and techniques
X-ray microscopy
Zone plates
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Summary:A brief description is given of a scanning transmission X-ray microscope (STXM) for use with synchrotron radiation allowing simultaneous X-ray imaging and imaging of surface topography. Surface topography, appropriate to both conducting and non-conducting samples, is sensed by successive “specimen hopping” i.e. planting of the specimen at and withdrawal from a fixed sharp tip, or stylus, formed by the scanning tip of an atomic force microscope (AFM). First experiments are described with 3 keV photons with zone plate resolution of about 100 nm. Preliminary work is also mentioned to add a collimator to improve spatial resolution (in principle to
ISSN:0304-3991
1879-2723
DOI:10.1016/S0304-3991(02)00138-9