Layer uniformity obtained by vacuum evaporation: application to Fabry-Perot filters

We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters' o...

Full description

Saved in:
Bibliographic Details
Published in:Applied optics (2004) 1989-07, Vol.28 (14), p.2960-2964
Main Authors: Grezes-Besset, C, Richier, R, Pelletier, E
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We show how we can measure with accuracy the distribution law of thicknesses deposited inside a vacuum chamber. These measurement techniques are applied to the simultaneous production of high rejection narrowband multiple halfwave Fabry-Perot filters. To prevent any alteration of the filters' optical properties, we must control the variations vs time of the evaporant distribution.
ISSN:1559-128X
DOI:10.1364/ao.28.002960