A photonic crystal ring resonator formed by SOI nano-rods

The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring r...

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Bibliographic Details
Published in:Optics express 2007-11, Vol.15 (23), p.15500-15506
Main Authors: Chiu, Wei-Yu, Huang, Tai-Wei, Wu, Yen-Hsiang, Chan, Yi-Jen, Hou, Chia-Hunag, Chien, Huang Ta, Chen, Chii-Chang
Format: Article
Language:English
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Summary:The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55mum. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31mum/1.55mum wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.
ISSN:1094-4087
1094-4087
DOI:10.1364/oe.15.015500