Ion-beam machining of millimeter scale optics

An ion-beam microcontouring process is developed and implemented for figuring millimeter scale optics. Ion figuring is a noncontact machining technique in which a beam of high-energy ions is directed toward a target substrate to remove material in a predetermined and controlled fashion. Owing to thi...

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Bibliographic Details
Published in:Applied optics (2004) 2000-02, Vol.39 (4), p.599-611
Main Authors: Shanbhag, P M, Feinberg, M R, Sandri, G, Horenstein, M N, Bifano, T G
Format: Article
Language:English
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Summary:An ion-beam microcontouring process is developed and implemented for figuring millimeter scale optics. Ion figuring is a noncontact machining technique in which a beam of high-energy ions is directed toward a target substrate to remove material in a predetermined and controlled fashion. Owing to this noncontact mode of material removal, problems associated with tool wear and edge effects, which are common in conventional machining processes, are avoided. Ion-beam figuring is presented as an alternative for the final figuring of small (
ISSN:1559-128X
DOI:10.1364/AO.39.000599