A versatile diffractive maskless lithography for single-shot and serial microfabrication

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Bibliographic Details
Published in:Optics express 2010-05, Vol.18 (11), p.11754-11762
Main Authors: Jenness, Nathan J., Hill, Ryan T., Hucknall, Angus, Chilkoti, Ashutosh, Clark, Robert L.
Format: Article
Language:English
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ISSN:1094-4087
1094-4087
DOI:10.1364/OE.18.011754