Optical coherence tomography for process control of laser micromachining

In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are diffic...

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Bibliographic Details
Published in:Review of scientific instruments 2010-03, Vol.81 (3), p.033705-033705
Main Authors: Wiesner, Markus, Ihlemann, Jürgen, Müller, Heike H, Lankenau, Eva, Hüttmann, Gereon
Format: Article
Language:English
Subjects:
Lasers
Microscopy, Confocal - methods
Microscopy, Electron, Scanning - methods
Microtechnology - instrumentation
Microtechnology - methods
Optical Fibers
Time Factors
Tomography, Optical Coherence - instrumentation
Tomography, Optical Coherence - methods
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Summary:In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of approximately 126 nm for surface detection and a lateral resolution
ISSN:0034-6748
1089-7623
DOI:10.1063/1.3356080