Comprehensive analysis of gratings for ultraviolet space instrumentation

Comprehensive measurements in the vacuum uv range of 1200-3000 A of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful anal...

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Bibliographic Details
Published in:Applied optics (2004) 1978-10, Vol.17 (19), p.3108-3116
Main Authors: Mount, G H, Fastie, W G
Format: Article
Language:English
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Summary:Comprehensive measurements in the vacuum uv range of 1200-3000 A of efficiency, polarization, and scattering of classically ruled and photoresist gratings are reported. The results show that the art of ruling gratings for vacuum uv use has reached a high level of sophistication and that careful analysis of grating properties can lead to useful improvement of the ruling art.
ISSN:1559-128X
DOI:10.1364/AO.17.003108