Assessment of surface roughness by x-ray scattering and differential interference contrast microscopy

X-ray scattering measurements at 8.3 A and 13.3 A are employed to study surface roughness down to 2.5-A rms. The x-ray setup is described, and its sensitivity is discussed. The scattering data are analyzed by electromagnetic scattering theory to give information about the surface roughness. Microgra...

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Bibliographic Details
Published in:Applied optics (2004) 1979-01, Vol.18 (2), p.236-242
Main Authors: de Korte, P A, Lainé, R
Format: Article
Language:English
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Summary:X-ray scattering measurements at 8.3 A and 13.3 A are employed to study surface roughness down to 2.5-A rms. The x-ray setup is described, and its sensitivity is discussed. The scattering data are analyzed by electromagnetic scattering theory to give information about the surface roughness. Micrographs of the same surfaces are made by differential interference contrast microscopy. A good correlation between these micrographs and the results from the x-ray scattering measurements is established, which indicates that differential interference contrast microscopy is a very useful tool for the evaluation of highly polished surfaces.
ISSN:1559-128X
DOI:10.1364/ao.18.000236