Optimised cantilever biosensor with piezoresistive read-out

We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited...

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Bibliographic Details
Published in:Ultramicroscopy 2003-10, Vol.97 (1), p.371-376
Main Authors: Rasmussen, P.A., Thaysen, J., Hansen, O., Eriksen, S.C., Boisen, A.
Format: Article
Language:English
Subjects:
Cantilever
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Piezoresistive read-out
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Silicide
Surface stress
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Summary:We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which—in contrast to conventional metal wiring—is compatible with the high-temperature LPCVD coating process.
ISSN:0304-3991
1879-2723
DOI:10.1016/S0304-3991(03)00063-9