Dual-frequency heterodyne ellipsometer for characterizing generalized elliptically birefringent media

This research proposed a dual-frequency heterodyne ellipsometer (DHE) in which a dual-frequency collinearly polarized laser beam with equal amplitude and zero phase difference between p- and s-polarizations is setup. It is based on the polarizer-sample-analyzer, PSA configuration of the conventional...

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Bibliographic Details
Published in:Optics express 2009-10, Vol.17 (21), p.19213-19224
Main Authors: Yu, Chih-Jen, Lin, Chu-En, Li, Ying-Chang, Chou, Li-Dek, Wu, Jheng-Syong, Lee, Cheng-Chung, Chou, Chien
Format: Article
Language:English
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Summary:This research proposed a dual-frequency heterodyne ellipsometer (DHE) in which a dual-frequency collinearly polarized laser beam with equal amplitude and zero phase difference between p- and s-polarizations is setup. It is based on the polarizer-sample-analyzer, PSA configuration of the conventional ellipsometer. DHE enables to characterize a generalized elliptical phase retarder by treating it as the combination of a linear phase retarder and a polarization rotator. The method for measuring elliptical birefringence of an elliptical phase retarder based on the equivalence theorem of an unitary optical system was derived and the experimental verification by use of DHE was demonstrated too. The experimental results show the capability of DHE on characterization of a generalized phase retardation plate accurately.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.17.019213