Properties of broadband depth-graded multilayer mirrors for EUV optical systems

The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is a...

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Bibliographic Details
Published in:Optics express 2010-03, Vol.18 (7), p.6957-6971
Main Authors: Yakshin, A E, Kozhevnikov, I V, Zoethout, E, Louis, E, Bijkerk, F
Format: Article
Language:English
Subjects:
Algorithms
Equipment Design
Models, Statistical
Optical Devices
Optics and Photonics
Physics - methods
Reproducibility of Results
Scattering, Radiation
Surface Properties
Time Factors
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Summary:The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial roughness, natural interlayers, number of bi-layers, minimum layer thickness, inaccuracy of optical constants, and thickness errors) are discussed. The results from an experiment on the fabrication of a depth-graded Mo/Si multilayer mirror with a wide angular bandpass in the [0, 16 degrees] range are presented and analyzed.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.18.006957