Extreme ultraviolet reflectors with metal-oxide multilayered structures

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Bibliographic Details
Published in:Applied optics (2004) 1986-04, Vol.25 (8), p.1266-1267
Main Authors: Delaboudiniere, J P, Vien, T K, Stehle, J L, Bernstein, P, Nevot, L
Format: Article
Language:English
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ISSN:1559-128X
DOI:10.1364/AO.25.001266