Atomic-nitrogen production in a radio-frequency plasma source

The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrog...

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Bibliographic Details
Published in:Optics letters 1993-11, Vol.18 (21), p.1843-1845
Main Authors: VAUDO, R. P, YU, Z, COOK, J. W, SCHETZINA, J. F
Format: Article
Language:English
Subjects:
Emission, absorption, and scattering of radio-wave and microwave radiation
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma properties
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Summary:The first high-resolution study, to our knowledge, of the optical emission from an Oxford Applied Research MPD21 nitrogen-plasma source is reported. The spectroscopic results clearly show that the MPD21 nitrogen-plasma source generates an appreciable flux of nitrogen atoms. This suggests that nitrogen atoms are the plasma species responsible for the successful p-type doping of ZnSe:N and related alloys.
ISSN:0146-9592
1539-4794
DOI:10.1364/ol.18.001843