Ellipsometric retrieval of the phenomenological parameters of a waveguide grating

Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-sec...

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Bibliographic Details
Published in:Optics express 2009-09, Vol.17 (20), p.18219-18228
Main Authors: Pietroy, David, Parriaux, Olivier, Stehle, Jean-Louis
Format: Article
Language:English
Subjects:
Algorithms
Equipment Failure Analysis - methods
Light
Refractometry - instrumentation
Refractometry - methods
Scattering, Radiation
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Summary:Ellipsometry gives access to the phenomenological parameters of a grating coupled slab waveguide structure and permits its functional modeling without a priori knowledge of the geometry of the structure. The evidence is shown by comparing with the exact electromagnetic modeling of a sliced cross-section of a singlemode grating waveguide biosensor chip cut by FIB and analyzed by SEM.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.17.018219