Micromachined silicon nitride deformable mirrors for focus control

We have built a 1000mum-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V....

Full description

Saved in:
Bibliographic Details
Published in:Optics letters 2001-08, Vol.26 (16), p.1280-1282
Main Authors: Himmer, P A, Dickensheets, D L, Friholm, R A
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have built a 1000mum-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.
ISSN:0146-9592
1539-4794
DOI:10.1364/ol.26.001280