MoRu-Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength

A MoRu-Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffrac...

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Bibliographic Details
Published in:Optics letters 2001-02, Vol.26 (3), p.125-127
Main Authors: Montcalm, C, Bajt, S, Seely, J F
Format: Article
Language:English
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Summary:A MoRu-Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.26.000125