Multichannel Nomarski microscope with polarization modulation: performance and applications

Using a two-dimensional CCD array, a photoelastic modulator, and a commercial Nomarski microscope, we built a differential polarization interferometer. Multichannel lock-in detection of the signal allowed us to reach a shot-noise limit corresponding to 5-pm path differences for a few seconds of reco...

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Bibliographic Details
Published in:Optics letters 1997-10, Vol.22 (20), p.1529-1531
Main Authors: Gleyzes, P, Boccara, A C, Saint-Jalmes, H
Format: Article
Language:English
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Summary:Using a two-dimensional CCD array, a photoelastic modulator, and a commercial Nomarski microscope, we built a differential polarization interferometer. Multichannel lock-in detection of the signal allowed us to reach a shot-noise limit corresponding to 5-pm path differences for a few seconds of recording time. This interferometer was used as a surface profilometer as well as a system for imaging through scattering media.
ISSN:0146-9592
1539-4794
DOI:10.1364/OL.22.001529