Waveguide-coupled AlGaAs / GaAs microcavity ring and disk resonators with high f inesse and 21.6-nm f ree spectral range

We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region....

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Bibliographic Details
Published in:Optics letters 1997-08, Vol.22 (16), p.1244-1246
Main Authors: Rafizadeh, D, Zhang, J P, Hagness, S C, Taflove, A, Stair, K A, Ho, S T, Tiberio, R C
Format: Article
Language:English
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Summary:We report the realization and demonstration of novel semiconductor waveguide-coupled microcavity ring and disk resonators. For a 10.5-microm-diameter disk resonator, we measure a finesse of 120, a resonant linewidth of 0.18 nm, and a free-spectral range of 21.6 nm in the 1.55-mum-wavelength region. We present the nanofabrication methods and the experimental results for 10.5- and 20.5-mum-diameter ring and disk resonators to show the feasibility of such devices.
ISSN:0146-9592