Soft x-ray lithography using radiation from laser-produced plasmas

Saved in:
Bibliographic Details
Published in:Applied optics (2004) 1985-07, Vol.24 (13), p.2024-2024
Main Authors: Gohil, P, Kapoor, H, Ma, D, Pekerar, M C, McIlrath, T J, Ginter, M L
Format: Article
Language:English
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1559-128X
DOI:10.1364/AO.24.002024