Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation

We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a si...

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Published in:Applied optics (2004) 1997-07, Vol.36 (20), p.4660-4665
Main Authors: Wang, X, Leger, J R, Rediker, R H
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Language:English
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container_title Applied optics (2004)
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creator Wang, X
Leger, J R
Rediker, R H
description We describe a method of fabricating multilevel diffractive optics by excimer laser ablation. A portion of a chrome mask containing many patterns is illuminated by 193-nm laser light and imaged by an objective lens onto a poly(imide) substrate. Ablation of an entire single pattern is achieved in a single laser pulse. Multiple pulses are used to vary the ablation depth, and multiple patterns are used to create a variety of multilevel optics. We have successfully fabricated arrays of eight-level diffractive microlenses with varying focal lengths and decenters. The optics performed with diffraction-limited focusing and near-theoretical diffraction efficiency (92%).
doi_str_mv 10.1364/ao.36.004660
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title Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation
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