Cr /sc multilayers for the soft-x-ray range

We have systematically investigated ultrathin Cr/Sc multilayers (nanolayers), using tunable soft-x-ray synchrotron radiation. The multilayers were optimized for use either in normal incidence or at 45 degrees at photon energies around the 2p-absorption edges of Sc (399 eV) and Cr (574 eV), respectiv...

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Bibliographic Details
Published in:Applied optics (2004) 1998-02, Vol.37 (4), p.719-728
Main Authors: Schäfers, F, Mertins, H C, Schmolla, F, Packe, I, Salashchenko, N N, Shamov, E A
Format: Article
Language:English
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Summary:We have systematically investigated ultrathin Cr/Sc multilayers (nanolayers), using tunable soft-x-ray synchrotron radiation. The multilayers were optimized for use either in normal incidence or at 45 degrees at photon energies around the 2p-absorption edges of Sc (399 eV) and Cr (574 eV), respectively. They were sputter deposited on Si wafers or on thin Si(3)N(4)-membrane support structures for use in reflection and in transmission, respectively, as polarizing and phase-retarding elements in a polarimeter. The performance theoretically expected with respect to reflection/transmission and energy resolution has been confirmed experimentally: A value of 7% for the normal-incidence peak reflectance at 395 eV was measured as well as a pronounced minimum in transmission for certain incidence angles and energies below the respective absorption edges, indicating significant phase-shifting effects.
ISSN:1559-128X
DOI:10.1364/AO.37.000719