A direct comparison between SEM [EBIC] and HVEM images of crystal defects in semiconductors

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Bibliographic Details
Published in:Ultramicroscopy 1977-08, Vol.2 (4), p.405-408
Main Authors: Blumtritt, H, Gleichmann, R
Format: Article
Language:English
Subjects:
Crystallography
Evaluation Studies as Topic
Microscopy, Electron
Microscopy, Electron, Scanning
Semiconductors
Silicon
Online Access:Get full text
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ISSN:0304-3991