Design and Characterization of Fabry–Pérot MEMS-Based Short-Wave Infrared Microspectrometers

Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Pérot filter and a Hg x Cd 1– x Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5  μ m to 2.6  μ m wavelength range....

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Bibliographic Details
Published in:Journal of electronic materials 2008-12, Vol.37 (12), p.1811-1820
Main Authors: Keating, A.J., Antoszewski, J., Silva, K.K.M.B.D., Winchester, K.J., Nguyen, T., Dell, J.M., Musca, C.A., Faraone, L., Mitra, P., Beck, J.D., Skokan, M.R., Robinson, J.E.
Format: Article
Language:English
Subjects:
Applied sciences
Characterization and Evaluation of Materials
Chemistry and Materials Science
Electronics
Electronics and Microelectronics
Exact sciences and technology
Fabry-Perot interferometers
General equipment and techniques
Infrared imaging systems
Instrumentation
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials Science
Micro- and nanoelectromechanical devices (mems/nems)
Microelectromechanical systems
Optical and Electronic Materials
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Solid State Physics
Spectrum analysis
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Summary:Microspectrometers based on the monolithic integration of a microelectromechanical system (MEMS) Fabry–Pérot filter and a Hg x Cd 1– x Te-based infrared detector are discussed and measured results presented. The microspectrometers are designed to operate in the 1.5  μ m to 2.6  μ m wavelength range. Design equations are presented which account for the mechanical and optical characteristics of the device. Measurements indicate linewidths as narrow as 55 nm, switching times of 40  μ s, and a tuning range of 380 nm, which is limited by snap-down. Optical characterization of the distributed Bragg mirrors and the Fabry–Pérot filter are presented, and these are shown to be in good agreement with simple first-order analytical models. Bowing of the movable Fabry–Pérot mirror due to stress gradients is identified as the dominant source of linewidth broadening.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-008-0526-0