High-numerical-aperture optical designs

Singh et al present an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.

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Bibliographic Details
Published in:IBM journal of research and development 1997-01, Vol.41 (1-2), p.39-48
Main Authors: Singh, Rama N, Rosenbluth, Alan E, Chiu, George L-T, Wilczynski, Janusz S
Format: Article
Language:English
Subjects:
Aperture
Design
Lasers
Offset printing
Optics
R&D
Research & development
Semiconductors
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Description
Summary:Singh et al present an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.
ISSN:0018-8646
0018-8646
2151-8556
DOI:10.1147/rd.411.0039