Study of hydrogen plasma in the negative-ion extraction region

The effect of the plasma electrode (PE) bias on the plasma characteristics near the extraction aperture in a large volume hybrid multicusp negative-ion source, driven at 2.45 GHz microwaves, is reported. Spatially resolved negative-ion and electron density measurements were performed under various p...

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Bibliographic Details
Published in:Plasma sources science & technology 2009-11, Vol.18 (4), p.045010 (8)-045010 (8)
Main Authors: Svarnas, P, Annaratone, B M, Bechu, S, Pelletier, J, Bacal, M
Format: Article
Language:English
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Summary:The effect of the plasma electrode (PE) bias on the plasma characteristics near the extraction aperture in a large volume hybrid multicusp negative-ion source, driven at 2.45 GHz microwaves, is reported. Spatially resolved negative-ion and electron density measurements were performed under various pressures (1-4 mTorr) by means of an electrostatic probe and photodetachment technique. The analysis of the results provides an explanation for the existence of the negative-ion density peak and the optimized extraction of the corresponding current in the same PE bias range, i.e. just above the plasma potential. The diagnostics employed are also discussed.
ISSN:0963-0252
DOI:10.1088/0963-0252/18/4/045010