A Combined Thermo-Electrostatic MEMS-Based Switch with Low Actuation Voltage

Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based Switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses...

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Bibliographic Details
Published in:Sensors & transducers 2010-04, Vol.115 (4), p.61-61
Main Authors: Mahmoudi, Parisa, Ghavifekr, Habib Badri, Najafiaghdam, Esmail
Format: Article
Language:English
Subjects:
Design
Finite element analysis
Radio frequency
Silicon nitride
Studies
Online Access:Get full text
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Summary:Requirement of voltage up-converters due to high pull-in voltage is one of the main problems by merely electrostatic actuated MEMS-based Switches. Thermally actuated switches are another alternatives but with very high power dissipation. In this paper a low voltage switch is demonstrated, which uses a combined thermo-electrostatic actuator. The switch can be integrated with standard CMOS circuits without any up-converters. Thermally power dissipation for the switch is lower than just thermal actuators. The switching time is about 70 µs and the maximal temperature of thermal actuator is lower than 150 °C which cannot cause any longtime damage. [PUBLICATION ABSTRACT]
ISSN:2306-8515
1726-5479
1726-5479