Pull-in voltage analysis of electrostatically actuated beam structures with fixed–fixed and fixed–free end conditions

In this paper, a closed-form expression for the pull-in voltage of fixed-fixed beams and fixed-free beams is derived starting from the known expression of a simple lumped spring-mass system. The effects of partial electrode configuration, of axial stress, non-linear stiffening, charge re-distributio...

Full description

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2002-07, Vol.12 (4), p.458-464
Main Authors: Pamidighantam, Sayanu, Puers, Robert, Baert, Kris, Tilmans, Harrie A C
Format: Article
Language:English
Subjects:
Computer simulation
Computer software
Electric potential
Electrostatics
Exact sciences and technology
Finite element method
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Physics
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, a closed-form expression for the pull-in voltage of fixed-fixed beams and fixed-free beams is derived starting from the known expression of a simple lumped spring-mass system. The effects of partial electrode configuration, of axial stress, non-linear stiffening, charge re-distribution and fringing fields are all included in the final expression. Further, the results obtained are summarized and validated with other existing empirical and analytical models as well as with finite element simulation results. The model agrees well with finite element simulation results obtained with COVENTORWARE software.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/12/4/319