Design of Two-Link, In-Plane, Bistable Compliant Micro-Mechanisms

A bistable mechanism has two stable states within its range of motion. Its advantages include the ability to stay in two positions without power input and despite small external disturbances. Therefore, bistable micro-mechanisms could allow the creation of MEMS with improved energy efficiency and po...

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Bibliographic Details
Published in:Journal of mechanical design (1990) 1999-09, Vol.121 (3), p.416-423
Main Authors: Jensen, B. D, Howell, L. L, Salmon, L. G
Format: Article
Language:English
Subjects:
Applied sciences
Drives
Electric energy storage
Exact sciences and technology
Linkage mechanisms, cams
Mechanical engineering. Machine design
Polycrystalline materials
Precision engineering, watch making
Silicon
Substrates
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Summary:A bistable mechanism has two stable states within its range of motion. Its advantages include the ability to stay in two positions without power input and despite small external disturbances. Therefore, bistable micro-mechanisms could allow the creation of MEMS with improved energy efficiency and positioning accuracy. This paper presents bistable micro-mechanisms which function within the plane of fabrication. These bistable mechanisms, called “Young” bistable mechanisms, obtain their energy storage characteristics from the deflection of two compliant members. They have two pin joints connected to the substrate, and can be constructed of two layers of polysilicon. The pseudo-rigid-body model is used to analyze and design these mechanisms. This approach allows greater freedom and flexibility in the design process. The mechanisms were fabricated and tested to demonstrate their bistable behavior and to determine the repeatability of their stable positions.
ISSN:1050-0472
1528-9001
DOI:10.1115/1.2829477