A study of the undercutting characteristics in the TMAH-IPA system

A new etching system of tetramethyl ammonium hydroxide-2-propanol (TMAH-IPA) is suggested. The undercutting ratio for TMAH at 80 degree C is about 7, much higher than for KOH etchants. The addition of IPA in the TMAH system maintains the main features of TMAH and reduces the undercutting ratio by a...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 1992, Vol.2 (3), p.181-183
Main Authors: Merlos, A, Acero, M C, Bao, M H, Bausells, J, Esteve, J
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Micromachining
Precision engineering, watch making
Silicon
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Summary:A new etching system of tetramethyl ammonium hydroxide-2-propanol (TMAH-IPA) is suggested. The undercutting ratio for TMAH at 80 degree C is about 7, much higher than for KOH etchants. The addition of IPA in the TMAH system maintains the main features of TMAH and reduces the undercutting ratio by a factor of 2-3.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/2/3/014